[Help] how to calculate characteritic impedendance in cmos

when i draw a line w=30um ,length=100um . what's itimpedence? how to calculate Z0 .if i have known the substrate parameter(TSMC 0.18um).
or which book is relative data.

You may consider like microstrip line on silicon. If we assume the relative permittivity of silicon 11.7 and if we know the substrate height which is generally 100-300um, we can calculate characteristic impedance of this transmission line.

Can't we ?

i will try it.
i have other question.if i calculate Z0 in cmos as microstrip line. how do i translate loss tangent to conductivity cause i just have conductivity in substrate not loss tangent. what's their relationship. or did you have some example?
thank you.

Do yourself a favor, download SonnetLite (www.sonnetsoftware.com, I work for Sonnet). Install is a couple minutes. Then do Help->Tutorial and you are up to speed on Sonnet in about an hour. Then capture your line on cmos, including substrate conductivity. Analyze it and you get S-parameters plus characteristic impedance and Eeff. Both Eeff and characteristic impedance are complex for lossy transmission lines.

To determine the accuracy, analyze a second time with half the cell size. The difference is about equal to the error of the smaller cell size result. You should be able to get results to about +/- 0.5% in Zo and +/- 0.1% for Eeff very easily.