Strange LCR meter readings

few days ago,i wanna measure L of a on chip spiral inductor.
i tune the LCR meter,freq=1kHz,current=1mA,and did the open and short(DC Probe connection) calibration. ALC on.
but the value is 3.xx uH !
the DC value is about 25nH.
why?

You should try some resonance method in the GHz range.
For very small inductances LCR meters are unusable

You should use some resonance method at RF freqs, as g579 said.
I am using my old/good Tesla BM409 Q-meter. It hasn't direct inductance readout, but is a great instrument to measure inductance, capacitance and Q factor up to 300 MHz.
If you have a good RF generator, you could breadboard the rest. Take a look at
hxxp://www4.tpgi.com.au/users/ldbutler/QMeter.htm
(x=t)

for the theory and practice of a Q meter.

regards, Al