on-wafer calibration

Hi, dear all,

Is there anybody knowing how to design the CPW on-wafer calibration circuits?

Or could you please introduce some useful references?

Thank you very much!

saryee

Here are a lot of documents where you will find the answer. Some of them were very helpful for me, when I was looking for this application.
http://www.boulder.nist.gov/div813/r...%20Calibration

Do you mean... design a Cal Kit or how to perform on-wafer measurement?

For easy media as waveguide, the design of a TRL calKit may be a job for an engineer. But media as CPW or ustrip require a close and continuative collaboration with metrologic institutes like NIST in US and NPL in UK... because who accurately know er and tand?
A single engineer can only choose what standard print on the sustrate and a rough estimation of the lines lenght.
Take a look for the manual of the GGB Industries Cal Kit model CS-5 www.picoprobe.com