Resistivity of Substrate at High Frequency

Hi,

Can anyone provide advise on how i can measure the Resistivity, Bulk Conductivity or loss tangent of a substrate (e.g silicon) at high frequency (from 0.1 to 5 GHz).

Any help will be much appreciated

Regards
Magneto

i also need

Make a standard TL on the substrate,measure its S parameters.Go back to ADS or other simulator to tune the substrate resistivity to get same result.

S parameter is dominated by permittivity rather than the resistivity f the substrate, I guess this will not give accurate result.

Right and wrong.

You need to know the material of the substrate first,hopefully you know.Then you can get its dielectric constant.Depend on the range of substrate resistivity,the S parameter could vary greatly or not.