about RFCMOS process ..

Dear all :
In RFCMOS 0.18um Process , why Metal 5 need wider width than
other metal layer ?

Thanks .

in metal 5 , it is wide , and low ressitivity , to be able to carry high current to be the mian supply line

another thing it is used on spiral inductor so that it give higher quality factor , so this minimize the serise resistance of the inductor

khouly

Thanks your reply,
If M5 is not use to do Inductor , only for connection ,and shrink M5 to 0.5um (don't care layotu rule) what will happen in process ?
will crush or breaken or other phenomenon ?

Thanks .

i think if u reduce the size of metal , may cause metal migratioin and this may fail the metal

khouly