What should the GSG probe pad size be for testing it?

Hai Guys:

In order to test the die utilizing GSG probe, What shall the on chip test pad size should be?. Thanks in advance

Rgds

It depends on the GSG on-wafer probe you are using mainly.

as for me, 80u*80u is OK

Hi :

Does the size depends on the GSG probe pitch size. Thanks in advance

Rgds

yes, I do think so.
and I think that you can find the minimum require value from the techfile of the probe producer.

large pad size eases measurement setting while brings about huge parasitice capacitance, so for me, the minimum possible value is just fine.