What is the nature of plasma impedance?
时间:04-09
整理:3721RD
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What is the nature of plasma impedance. Is it capacitive or inductive? I am talking about the applications related to Plasma enhanced chemical vapor deposition (PECVD). The operating frequency is 70MHz.
did you got the answer of your question. if yes kindly share with me. I am also interested in knowing this.
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