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Rf MEMS Switch (Fixed-fixed Beam) with Meander

时间:03-30 整理:3721RD 点击:
Dear All,
Please help me to get pull in voltage in Ansys Command. I got the beam structure and can't set the dielectric in Ansys command. Anyone can help me and send the code.
Thanks

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http://nitinksaluja.blogspot.in/2012...echanical.html

Hi,

I am struggling to build my first RF MEMS (cantilever type) on PCB boards (Rogers 4003c) in the clean room but I cannot achieve a thick photoresist as the sacrificial layer. I need around 22um thick, does anyone know how can I get that? The most I have achieved has been around 10um, so I was thinking if it is possible to use two or more photoresist layers, one over the other one to get that? or use another type of sacrificial layer, any suggestions?

Thanks!

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