Meshing in MEMS design

Hi
I'm using Coventor ware tool for designing the capacitor.
I have struck in meshing for an particular design. the mesh (same mesh type for all layers in design) that i have tried is taking about 7 hours for mem mech simulation.
Please help me to get rid of this problem (about meshing).
can i do different mesh for different layers in 3D model?

can we scale down the dimensions of the design by editting anywhere except redrawing the layout?

regards

P kumar

Hi, do u have any MEMS intellisuite software manual?