我不知道为什么大家不先好好看看复旦这篇Science的文章？

文中好像粗看也没有提到具体的器件尺寸（也许是我看得不仔细？），难道这也属于保密范围？

你这老黄历了，都占到整个revenue的10%了，不是号称了

SMIC 2Q13 profits soar on record revenues
Jessie Shen, DIGITIMES, Taipei [Friday 9 August 2013]
IC foundry Semiconductor Manufacturing International (SMIC) has announced that net profits rose 85.7% sequentially to US$75.4 million in the second quarter of 2013. Consolidated revenues climbed to a record US$541.3 million in the quarter, which marked the fifth consecutive quarter of record sales.
SMIC's consolidated sales for the second quarter of 2013 represent growth of 28.3% on year and 7.9% on quarter. The firm disclosed its China-based clients accounted for 40.9% of the second-quarter sales, compared to 38.6% in the prior quarter and 32.7% in second-quarter 2012.
SMIC generated a second-quarter gross margin of 25%, up from 19.9% in the first quarter and 24.1% in second-quarter 2012. The foundry utilized 98.5% of its capacity in the second quarter, compared to 89% in the prior quarter and 95.2% a year earlier, the firm revealed.
"I am very pleased to report that SMIC has exceeded expectations," said company CEO and executive director Tzu-Yin Chiu. "Revenue from our China customers grew 14.3% sequentially and 60.6% on-year. Our 40/45nm revenue grew 71.9% sequentially contributing 10.0% of total wafer revenue compared to 6.4% in the first quarter of 2013."
Sales generated from 65nm and below processes accounted for a combined 40.9% of SMIC's total wafer sales in the second quarter of 2013, compared to 38.5% in the prior quarter and 33% a year ago. The 45/40nm process segment took a 10% share in second-quarter 2013, up 3.6pp on quarter and 9.8pp on year.
"Demand for our differentiated applications continues to be strong, especially in the areas of power management, CMOS image sensor, and EEPROM. In order to further capture the market opportunities and to enhance our position in differentiated technologies, we are looking into various opportunities to expand our 8-inch capacity," Chiu continued.
Looking forward, SMIC expects revenues (excluding Wuhan Xinxin silicon wafer shipments) to decrease 1% or increase by up to 2% sequentially. Revenues including wafer shipments from Wuhan Xinxin are expected to register flat growth or drop by up to 3% on quarter.

哦，SMIC看来速度还蛮快的么，不知道他家22nm的工艺线什么时候能够量产

贴了一个截面，管子应该是1.5um的，其实非常大了
话说寿命要是只有100万次的话，用在频率上G的cpu里面还不几秒可能就挂了？

中国有Ebeam了?

28nm快了, 至少Poly/SiON 结构. Metal gate还有路要走.
SMIC不做22nm, Foundry 都学TSMC, 做20nm 还在调工艺，单器件还没好吧

不算很难，设备和材料已经把绝大部分问题解决了。国内能达到这个水平的地方还是挺多的。

中国有beam litho的历史肯定比你的年龄要长。

我知道ebeam可以用来做掩模板，但是晶圆上光刻还在实验室吧，国内哪里做？量产来说
在193nm immersion之后看起来euv已被选中

自己树靶子自己打，有意思吗？谁和你说量产了？
自打有ebeam litho开始，就在片子上做光刻了。国内做电子束光刻，往少了说也有30年了，现在有点儿规模的大学都有电子束光刻设备。