high freqency noise test question

I have a question puzzled me for long times. because I have to test the high frequency noise on wafer, but unfortunatly the power and signal line which conect wafer and equipment have large inductence nearly 100nH, how can I reduce this impact?
and another question is my rf output noise signal include dc value, so I can't connect it to large bandwith oscillacope's 50 Ohms probe, how can I do except add a series capacitance? and the noise frequency is at 1 or 2 GHz, does it have problems when add series cap?

And you are not using a microwave probe to provide DC power for what reason?

I don't have the microwave probe, what's the benefit of the microwave probe?