What do I need to measure the performance of a CMOS filter on-wafer?

I plan to design a filter using cmos technology. May i know what instrument i need to measure the performance of the filter on-wafer (from 1G - 3Ghz)?

The filter need to design to match input and output 50ohm for measurement purpose?

Thanks for your help.

Hi,

I would recommend network analyzer in conjuction of probe station to fascilitate usage of CPW GSG probes for on wafer measurements.

flyhigh

Hi flyhigh,

Thanks for your kindly reply.

If i use network analyzer to measure my filter, i need to design my filter input and output port to match 50 ohm or not? what parameter i need to observed? is it S21?