On chip Spiral inductors and substrate dielectric constant

Hi all,

I just want to know what effect the dielectric constant of the substrate has on the 'L' of a spiral inductor.

Can it be said that only 'C' depends on epsilon and not 'L' ? How about 'Q' ?

Thanks
svarun

The dielectric constant of the silicon substrate is about 11.9
the Q may be about 5~6 (simulate result<10)

Thanks czn

I was looking at what happens if you vary the epsilon ? Does 'L' get affected ? L is magnetic property and epsilon is related to dielectric property. Will L depend on epsilon at all ?

svarun

Hi, Svarun:

I think both L and C will be affected when the frequency is not very close to DC, even though the effect on L is less obvious.

Best regards,