Spiral INDUCTOR Design

Hi,

I want to design a silicon spiral inductor and send to fabrication.
Can anyone help me how to proceed..........

What should be the order of Design ............ (I have HFSS)

like,

Layout, Simulation etc..

First Do I need to start with Layout or simulation in HFSS ..... Does HFSS support Layout...

If I want to send design to Fabrication ,,,,, How the design should be ...


More ever I want to entire process of Design, layout and Fabrication and what are the tools required ?


Thanks

Kasi

See following thesis
http://www.atips.ca/groups/rfic/thes...cu_Masters.pdf

According to my Info
You need to start making structure in HFSS first
simulate it
& then make layout
You can export the .hfss file to .dwg or .iges. etc.
Check export option in HFSS

There is a HFSS example about spiral inductor in the HFSS full book. look it out.