EM simulation for MOS Technology

Hi

I have to characterize a deep micron transistor for very high frequency operation(mm-wave). For that I need to simulate the layout of the transistor(considering all the metal layers and dielectrics involved) with a electromagnetic wave simulator, like IE3D.

I understood that simulators like IE3D simulates metals layers only, so I can not interpret the si-substrat profile, i.e., the wells and source/drain widths and channel length etc. Hence I can not see the effects due to these substrate profile.

Is there any other simulator which does em wave simulations for mos technology ?

I hope I am clear, if not you can post questions to make it more clear.

Thanks in Advance

Siva Rama Krishna R