Suggest good book on microwave high power generation

I am intrested in book on
1. Microwave High Power generation
2. Application of Microwave in semiconductor industry
3. Microwave Power for plasma generation

Please suggest good book or good URL for above topics.

Thanks

Hi Manoj,
Kindly check this book,
High Power Microwaves, Second Edition (Series on Plasma Physics) by James Benford, John A. Swegle, Edl Schamiloglu.
Publisher: Taylor & Francis
Hope this helps you...