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Checking if onWafer SOLT calibration with coplanar GSG probes is correct

时间:04-01 整理:3721RD 点击:
Hallo,

to check if OnWafer SOLT Calibration with Coplanar GSG probes is correct,
it is recommended to measure the standards SHORT, OPEN, LOAD, THRU after calibration to extract L-SHORT, C-OPEN, R-LOAD and C-LOAD.
The CAL is only correct, if these values are the ones specified by the Calibration substrate supplier. Right ?
If I do so, not all of the extracted values match the specification, but the
further applied measurements look quite good.
Any ideas ?

elec

have you checked your probes? if the probes are dirty or misplaced on calibration standards calibration can be uncorrect.
could you supply more information about your measurement setup?

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