How to extract crosstalk cap

Hi all,

I don't whether it is suitable to post here.

I want to evalutate the crosstalk capacitances among several parallel metals wire in a chip design. Since these crosstalk caps can't be extracted via the EDA tools, like calibre xRC, running on the poor model file from foundry, I want to do this myself via some EM field solver. But I am nearly zero on this process, about how to modeling, how to runing the tools, and which tools I need, could anybody here can give me some advice?

Any reply will be appreciated.

Thanks a lot.