Help on Stackup for Spiral Inductor

Hi Guys,

I had made HFSS design for square spiral structure. Please find the stackup attached in document. Now I want to model the same in ADS Momentum.
I have defined the substrate information in ADS Momentum along with layer Stackup.

Requesting you to please give a look at attached document on comment/suggest if my understanding of stackup is correct while transferring my design
from HFSS to ADS.

My Question:
In HFSS the First metal layer is on the top of the oxide but second metal layer is embedded in oxide. They are joined by via of depth 0.5um. I am not sure how this needs to be done in ADS.Please see my understanding of ADS substrate definition in attached document.

Thanks a lot for the help.

Regards,

Hemanshu Abbey