金丝键合射频互连线特性分析

大了5-10 dB。所提出的电容补偿结构显著地改善了由于金丝键合的寄生电感效应所恶化的互连传输特性。

4、结论

本文提出了一种金丝键合互连线的电容补偿结构。通过对键合互连线的电磁特性进行建模和分析，设计了电容补偿结构来减小键合互连线的寄生电感影响。与未进行电容补偿的金丝互连线相比，所设计的金丝键合电容补偿结构可以明显改善互连线传输特性。在Ka 频段，插入损耗减小了0.1 dB-0.2 dB；回波损耗（在20-30 GHz 的频率范围内）增加了约23 dB。采用本文所提出的金丝键合电容补偿结构，可以有效地用于多芯片电路中传输线与芯片、传输线和传输线之间的互连设计。

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