What is this component called ? (for Probe-station measurements)

Hi all,

I have seen this component, as attached. It is used for holding the chip under on-wafer measurements. It has some holes to let the chip sucked by the vacuum pump of the probe station.

However, I don't know exactly what it is called and where I can buy it.

Anyone knows this component and where to buy ?

Thanks a lot,

DYL

This is the "chuck".

Hi volker_muehlhaus,

Thanks a lot for the feedback.

However, I think that the "chuck" means the big aluminum supporter underneath this component. The chuck itself provides the wafer supporter and the chuck normally comes with the probe station.

This component (the black rectangle one), I think, we need to buy it separately. It is placed between the chuck and the chip to support the chip, which is much smaller than the wafer size. We cannot use the vacuum hole from the chuck to attach the chip directly, because the separation of each hole is too far compared to the size of the chip.

Thank you very much again for your answer :)

DYL