Which software is best for ICP ion source design and sim?

I am trying to design an Inductively Coupled Plasma Ion Source and do it's 3D simulation. Which software is the best for this perpose?

CST, HFSS , ... ?

Lets make it a bit more clear. First I need to do induction coil simulation. I have a photo of the coil here:

https://www.edaboard.com/ftopic364992.html

Which software do you recommend for simulation of this coil when a RF power is connected to it? CST, HFSS, Maxwell 3D, ... ?

Coil will be energised with a 13.56 MHZ 5KW RF generator and will Ionize H2 to creat plasma. I want to see how plasma behaves. Later I will add electrods for positive ion exctraction which also will need simulation software (probably the same software) for designing electrod geometry.

After a lot of search I found the only software capable of doing ICP simulation is Pasmator from Kinema. They used to give away free demo but I missed it. Anyone has this demo or knows where to find this software please let me know. It seems it is discountinued.

how have you designed your coil. kindly tell me how the modelling and design of this type of coil is done in HFSS and CST.

I am after plasma simulation and HFSS and CST can not do this kind of simulation. Only Plasmator can do it. But coil can be designed using CST and HFSS I think (I haven't done it though).

still I looking for the Plasmator software?

I dont think there are any software tools available for ICP design. If you have any specific question, you may mail me. Coil design is not very difficult. It depends on your application. i have designed an ICP ion source without any simulation tools and works beautifully.
Nabhiraj
Yalagoud.nabhiraj@gmail.com