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MIM capacitance measurement (simple question)

时间:04-01 整理:3721RD 点击:
hello all
i am trying to make Metal insulator metal capacitor using momentum, the only little problem i am facing is how to measure its capacitance with results in S parameters, i am using reactive part of S21 to measure capacitance, Is it correct!
secondly how could i use S parameter value to optimize the capacitor, the impedance value is not available in optimization, so all i have is the value of S parameter,

use S11 , and plot it in smith chart , u will find the impedance

khouly

please have a look a capacitor is attached between port 1 and 2 and between port 3 and 4, now i want to know the value of capacitor with S parameters, i know it can be checked with reactive part of impedance but which one S11 or S21, actually power from port one is coupled to port 2 and 3, so please tell me which parameter will give the value of capacitance,

Why don't you have 1-port network. then, convert the S-part to Y-par. C=imag(Y)/omega.

@wlcsp
how could i have a one port network for the figure above? but you are right i can make one port device of capacitor with short at other end. but how could i optimize it with results of S parameter, remembering i have S11 data not the impedence value!

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