Momentum simulation on MIM capacitors

Hi all,

have any one ever simulating a mim capacitor in momentum?

I understand that the mim capacitor uses some extract layers and different substrate thickness. so the substrate definition in momentum will be different in momentum for mim capacitors. Then I have problem in simulating a mim cap with a inductor, since they have different substrates.

Is there some way that I could get around this?

And another problem is that the dielectric between capacitor layers is well below 0.1um, is it not good in simulating in momentum?

Thanks guys.

Jimiblues