Mesh generation problem about mems switch design
时间：03-31
整理：3721RD
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Hi guys:
Mesh generation has failed when I simulated a MEMS switch using HFSS11. Below is the picture of my model. I thought it is the problem of the hight of the dielectric layer(0.1um), since the problem is solved when I increase the hight value to 0.2um.
Also, there are three error messages shown in the mesh error log:
"Two entities from different bodies are misaligned"
"Two bodies show big change in common contact area in Fault Tolerant Meshing"
"The Model Resolution Length specified for this object may be too large"
Can anyone tell me how to decrease the model resolution length specified for the electric layer? And more importantly, if I want the height of electric layer still be 0.1um, what else should I do? Please help.
Mesh generation has failed when I simulated a MEMS switch using HFSS11. Below is the picture of my model. I thought it is the problem of the hight of the dielectric layer(0.1um), since the problem is solved when I increase the hight value to 0.2um.
Also, there are three error messages shown in the mesh error log:
"Two entities from different bodies are misaligned"
"Two bodies show big change in common contact area in Fault Tolerant Meshing"
"The Model Resolution Length specified for this object may be too large"
Can anyone tell me how to decrease the model resolution length specified for the electric layer? And more importantly, if I want the height of electric layer still be 0.1um, what else should I do? Please help.