MIM capacitor design flow

Hi for all,
I am planning to start a new design, it is about MIM capacitor for DRAM applications.
In fact, i am facing a delima :? , I can't figure out the best design flow/tools.
the project should cover all aspects of the process; mechanical structure, physical proprieties, device integration on top of substrate ..
So, In the first place, I have to take decision on the design flow ; In ower univ we have a lot of tools : ADS, COMSOL, HFSS, Silvaco, MatLab, HSPICE, Cadence Virtuoso ...

In my opinion, i will fellow the next :

1) Do Mechanical design and the thermal analysis in COMSOL MultiPhysics.
2) Export the design and doing Electromagnetic analysis in HFSS.
3) Export the design from HFSS as a GDS2 file and do the electrical analysis in Silvaco.
4) Extract a Spice Model of the design for frequency response using HSPICE.
5) Device integration and layout using Virtuoso.

I know that is a challenging job that i put myself into, but it worth the effort
But my problem is :
1* compatibility between tools,
2* when exporting, if i assign a particular material in COMSOL (like HfO2) , other tools will recognize it ? GDS2 format describe material properties (like dielectric constant ..) ?
3* accuracy ...

please tell me about the best design flow, i will be very thankful.