High aspect ratio simulation problems in HFSS

I am trying to simulate a 3D model with has a high aspect ratio (difference between the smallest and the largest dimension in the design). I am using HFSS 13.The largest object is 130X130X3 mm^3 and the smallest one is a cylinder which has a thickness of 10 nm and height and radius of 10 um. When I run the model I got this error "surface mesh is deformed too much on the bodies". This model works if I change the thickness to 2 um. Do you have any suggestion for me?

Thanks,
Sun