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I will compensate your help for microwave induced plasma

时间:03-30 整理:3721RD 点击:
My name is Sotο , i'm engineer mechanic.
In my free time evolve a methode to construct mechanical micro components through CVD (Chemical Vapour Deposition).
This method deposit thin layers of hard crystalic materials on silicon buffers. The outline is cutting with LASER and finaly
the buffer is removed by chemical etching.
Examples of this type of components are: micro gears , micro wheels etc.

This process take place inside a plasma champer generated by 2.45 Ghz microwave and/or RF power.
Unfortunetly i dont know match about microwaves/RF and microwave/RF induced plasma theory.
I'm searching for an expert to help me to disigne(in CSTstudio suite) , simulate and optimize this champer.
I'm prepare to compensate this help , if you intrested please contact me.
Thank you

Sotο
Kolxidos 69 , 16777 , Elliniko , Athens , Greece
email: sotopapa@otenet.gr

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