Modeling and Simulation of Vertical Inductors

Hello Everyone,

I am given a task to model and simulate of 3D Chip Stack Vertical inductors in 130 nm SiCMOS with 6 metal layers technology in Ansoft HFSS
I am very much new to HFSS.

Could you please give guidelines regarding this?

If you could give me some step by step guideline document.

Regards,

If you are new to hfss, you should at least perform the tutorial with the patch antenna.
Then check the help file for the terminal excitation. There is an example with vias.

Thank you for your answer.

I am performing all the tutorial examples in HFSS.

But I am not sure how should I start with vertical inductors.How to deal with the Mutual inductance(+M,-M) and self resonance of the vertical inductors in hfss.

If you could just tell me the steps I should go throug during the design.

I would highly appreciate it.