DFM items 的解释

DFMC items- VIA (Redundant Via Ratio)
- PM (Hotspot Pattern Matching)
- MCD (Manufacturability Check Deck)
- CMP (Chemical Mechanical Polishing)
- LFD (Litho Friendly Design simulation)
- FLFD ( Fast mode LFD)

麻烦大师帮忙详细解释解释啊

TSMC28?