patterning中文啥意思？

However, the throughput of electron-beam lithography is currently insufficient
for sub-20 nm resolution patterning over large areas.

微影成形( Lithography Patterning )
For fabricating X-ray mask of high line-density X-ray transmission gratings, the field stitching of E-beam lithography was analyzed when patterning high line-density gratings;
为了制备高线密度X射线透射光栅掩模，分析了电子束光刻中场拼接对高线密度光栅图形的影响；

谢谢！