Spiral Inductors Parameter extraction in HFSS environment

Hi all,

I am working on Ansoft HFSS to simulate a spiral inductor.

I dont know how to extract the circuit model parameters like Rsub(Substrate resistance), Csub(substrate capacitance), Cs1, Cs2, Rs etc shown in foll. diagram.

plz post if u have any idea or formulas.

Thanks in Advance.

hi all,

i think we can find the z,y parameters in hfss easily by doing proper simulation...& then express the ckt parameters like Ls & Rs in terms of Z or Y parameters.....

that should be done.......

Does anyone has a new or more correct idea?