TLIN and MIM-Capacitor Characterization using Chebyshev Filter

Hello Guys,

I need your help.
I have created lumped-element models for single MIM-Capacitors and for micros trip transmission lines.
I also got three 3rd order chebyshev low passes, built of MIM-Capacitors and tlines.
I want to use these filters to do any characterization about my MIM-Capacitors and my lines. I want to extract any information about them out of those filters.
What I have done up to now is verifying my models using that filter. But I hope you guys have some idea what more information i could get out of it.
Can the resonant frequency and the ripple of the insertion loss maybe give me some special information?

I am grateful for every piece of help,

MattiJo

All approaches and ideas are welcome, those which are not so promising as well...;)