Sprial Inductor and its GSG test Fixture

Hi,

I want to design CMOS Spiral Inductor with GSG test Fixture.

Can any one proveide me one example with specifications.

Specifications Like,

Inductor: L, Frequency, Q etc.

Sunstrate Conductivity, Substrate dimensions, oxide thickness etc.

I am using HFSS to design an Inductor And its GSG test Fixture.


Thanks

KASI