Process PCM Specification是什么意思

process control moniter，监测器件的主要的参数有没有超出spec

For fab, they wll test some device parameters to control or moniter their process vaviation. Such device will be integrated in the GDS reticle, at the scribe line which will be used for die sawing during package process.

Your answer is very perfective. Thanks very much.

非常感谢！总算明白了！