用silvaco软件将铁电材料加到SOI上,程序应该怎么写
时间:10-02
整理:3721RD
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下面的程序是我基于SOI例子改的,但程序老是出错,求大神指教。
# (c) Silvaco Inc., 2015
go atlas
TITLE SOI device simulation
#
# 0.2um of silicon on 0.4um oxide substrate
#
mesh space.mult=1.0
#
x.mesh loc=0.00 spac=0.50
x.mesh loc=1.15 spac=0.02
x.mesh loc=1.5 spac=0.1
x.mesh loc=1.85 spac=0.02
x.mesh loc=3 spac=0.5
#
y.mesh loc=-0.025 spac=0.02
y.mesh loc=0.00 spac=0.005
y.mesh loc=0.1 spac=0.02
y.mesh loc=0.2 spac=0.01
y.mesh loc=0.6 spac=0.25
#
region num=1 y.min=0.2 oxide
region num=2 y.max=0.2 y.min=0.199 silicon
region num=3 y.min=0.0 y.max=0.199 silicon
region num=4 y.min=-0.001 y.max=0.0 oxide
region num=5 y.max=-0.001 y.min=-0.025 oxide
#
#*********** define the electrodes ************
# #1-GATE #2-SOURCE #3-DRAIN #4-SUBSTRATE(below oxide)
#
electrode name=gate x.min=1 x.max=2 y.min=-0.025 y.max=-0.025
electrode name=source x.max=0.5 y.min=0 y.max=0
electrode name=drain x.min=2.5 y.min=0 y.max=0
electrode substrate
#
#*********** define the doping concentrations *****
#
doping uniform conc=2e17 p.type reg=3
doping gauss n.type conc=1e20 char=0.2 lat.char=0.05 reg=2 x.r=1.0
doping gauss n.type conc=1e20 char=0.2 lat.char=0.05 reg=2 x.l=2.0
#
# define ferroelectric material
#
model region=5 ferro
material region=3 ferro.ps=0.5e-6 ferro.pr=0.4e-6 ferro.ec=100000.0 ferro.eps=10.0
#
# set workfunction of gate
contact name=gate n.poly
material mun=800.0
#
# set interface charge separately on front and back oxide interfaces
interf qf=3e10 y.max=0.1
interf qf=1e11 y.min=0.1
#
# select models
models conmob srh auger bgn fldmob print
save outf=lee03_0.str
tonyplot lee03_0.str -set lee03_0.set
#
solve init
#
# do ID-VG characteristic
#
method newton trap
solve prev
solve vgate=-0.2
solve vdrain=0.05
solve vdrain=0.1
#
# ramp gate voltage
log outf=lee03_1.log master
solve vgate=0.1 vstep=0.1 name=gate vfinal=1.5
#
# plot resultant ID-VG threshold voltage curve
tonyplot lee03_1.log -set lee03_1.set
#
# plot resultant IDVG subthreshold slope curve
tonyplot lee03_1.log -set lee03_2.set
#
#
extract name="subvt" \
1.0/slope(maxslope(curve(v."gate",log10(abs(i."drain")))))
#
#
extract name="vt" (xintercept(maxslope(curve(v."gate",abs(i."drain")))) \
- abs(ave(v."drain"))/2.0)
#
quit
# (c) Silvaco Inc., 2015
go atlas
TITLE SOI device simulation
#
# 0.2um of silicon on 0.4um oxide substrate
#
mesh space.mult=1.0
#
x.mesh loc=0.00 spac=0.50
x.mesh loc=1.15 spac=0.02
x.mesh loc=1.5 spac=0.1
x.mesh loc=1.85 spac=0.02
x.mesh loc=3 spac=0.5
#
y.mesh loc=-0.025 spac=0.02
y.mesh loc=0.00 spac=0.005
y.mesh loc=0.1 spac=0.02
y.mesh loc=0.2 spac=0.01
y.mesh loc=0.6 spac=0.25
#
region num=1 y.min=0.2 oxide
region num=2 y.max=0.2 y.min=0.199 silicon
region num=3 y.min=0.0 y.max=0.199 silicon
region num=4 y.min=-0.001 y.max=0.0 oxide
region num=5 y.max=-0.001 y.min=-0.025 oxide
#
#*********** define the electrodes ************
# #1-GATE #2-SOURCE #3-DRAIN #4-SUBSTRATE(below oxide)
#
electrode name=gate x.min=1 x.max=2 y.min=-0.025 y.max=-0.025
electrode name=source x.max=0.5 y.min=0 y.max=0
electrode name=drain x.min=2.5 y.min=0 y.max=0
electrode substrate
#
#*********** define the doping concentrations *****
#
doping uniform conc=2e17 p.type reg=3
doping gauss n.type conc=1e20 char=0.2 lat.char=0.05 reg=2 x.r=1.0
doping gauss n.type conc=1e20 char=0.2 lat.char=0.05 reg=2 x.l=2.0
#
# define ferroelectric material
#
model region=5 ferro
material region=3 ferro.ps=0.5e-6 ferro.pr=0.4e-6 ferro.ec=100000.0 ferro.eps=10.0
#
# set workfunction of gate
contact name=gate n.poly
material mun=800.0
#
# set interface charge separately on front and back oxide interfaces
interf qf=3e10 y.max=0.1
interf qf=1e11 y.min=0.1
#
# select models
models conmob srh auger bgn fldmob print
save outf=lee03_0.str
tonyplot lee03_0.str -set lee03_0.set
#
solve init
#
# do ID-VG characteristic
#
method newton trap
solve prev
solve vgate=-0.2
solve vdrain=0.05
solve vdrain=0.1
#
# ramp gate voltage
log outf=lee03_1.log master
solve vgate=0.1 vstep=0.1 name=gate vfinal=1.5
#
# plot resultant ID-VG threshold voltage curve
tonyplot lee03_1.log -set lee03_1.set
#
# plot resultant IDVG subthreshold slope curve
tonyplot lee03_1.log -set lee03_2.set
#
#
extract name="subvt" \
1.0/slope(maxslope(curve(v."gate",log10(abs(i."drain")))))
#
#
extract name="vt" (xintercept(maxslope(curve(v."gate",abs(i."drain")))) \
- abs(ave(v."drain"))/2.0)
#
quit
没有人吗
可以加个qq吗576238308。我也正在解决这个问题