MEMS techology faabrication

Hi, may i knw why intellisuite software suitable for MEMS ? beside this software stil gt what type of software suitable for MEMS fabrication and may i ask anyone knw how to find intellisuite software manual to learn? can send me the manual or links, please ? thansk.

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or any one knw where can get the intellisuite software manual? Help!~~thanks

Hi Alice,

the software has not to be suitablefor MEMS fabrication. What I mean is that what you send for mask fabrication in almost all the IC process (including MEMS process) is a GDS file. In that sense you have a lot of layout editors that allow you to draw MEMS devices and export GDS file for mask fabrication. the differennce is that some of these software allow you to pass DRC, check for connections and so...steps that are critical before sending GDS to the foundry.

You are looking for MEMS design software. Another well known software for MEMS design is Coventor

http://www.coventor.com/

BR

Marco

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