Simulation of RF MEMS structures

Hello all,
I am trying to simulate MEMS varactors (like PARALLEL PLATE) in HFSS. I could not understand port definitions(like whether to use waveport or lumped port etc) and excitations very well. CAn anyone who has done simulation of mems structures help?
thanx

seems no1 in the forum is working in MEMS...let me findout myself and tell the world!!

Hello,
for simulation of your mems structure you can use ANSYS (for simulation of mechanical parameters of your varactor and also low frequency properties of your structure) and HFSS (for high fr. response of varctor).

hope help you,
mems123

hi mems,
I am using Coventor for mech and coupled electro-mech simulations. Coventor is very easy(costly though) when compared to HFSS.
thanx for your reply
cv