csmc 0.5um工艺里面的p plug层是什么作用?
时间:10-02
整理:3721RD
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各位,我有个问题要请教,csmc的0.5工艺,有两个option,一个是with p plug另一个是without p plug。mask层数一样,前者增加一层p plug photo layer。我查了很久没找到p plug是什么意思,这个差异在哪里?
两套pdk我比较过,只有design rule有一点点区别,with plug的,active area overlap contact的距离最小是0.15,without plug的,是0.3
两套pdk我比较过,只有design rule有一点点区别,with plug的,active area overlap contact的距离最小是0.15,without plug的,是0.3
active area overlap contact =0.15um=>need contact implant to avoid leakage
所以,contact implant叫plug ? p plug?
所以,contact implant叫plug ? p plug?
所以,contact implant叫plug ? p plug?
仔细研究了上华的工艺,孔注入有两种
1. Contact N+普注, Conact P+ with mask 注入。此时 N+/P+ active overlap contact:0.15/0.3.
2. Contact N+普注, No contact P+ 注入,此时 N+/P+ active overlap contact:0.3/0.3.